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- Shikida Mitsuhiro
- Nagoya University
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- Sato Kazuo
- Nagoya University
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- Takeshita Kengo
- Nagoya University
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- Akamatsu Akio
- Nagoya University
書誌事項
- タイトル別名
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- Operation of S shaped Film Actuator in
この論文をさがす
抄録
We have experimentally confirmed the film operation of an electrostatically-driven S-shaped film actuator in a liquid environment and investigated response time as the function of a micro-fluid-control device. The actuator has an S-shaped film element whose S-shape travels laterally by electrostatic force. We used a hand-made model of the actuator. Film operation was carried out during immersion in silicone oils of different viscosities. The film was able to be successfully operated by electrostatic force under all viscosity conditions. The film travel is separately discussed in two different regions, which are acceleration and terminal velocity motion. The terminal velocity of the S-bend was proportional to the square of the applied voltage and was inversely proportional to the viscosity of the silicone oil. The velocity was 90mm/s when the film driving voltage was 220V.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 117 (4), 227-231, 1997
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204460162176
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- NII論文ID
- 10005111464
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 4172334
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可