A Silicon Micro Probe Array on a Flexible Substrate for Neural Recording
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- Akamatsu Naoki
- Institute of Indastrial Science, The University of Tokyo
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- Suzuki Takafumi
- Graduate School of Information Science and Technology, The University of Tokyo
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- Mabuchi Kunihiko
- Graduate School of Information Science and Technology, The University of Tokyo
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- Fujita Hiroyuki
- Institute of Indastrial Science, The University of Tokyo
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- Kim Beomjoon
- Institute of Indastrial Science, The University of Tokyo
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- Takeuchi Shoji
- Institute of Indastrial Science, The University of Tokyo
Bibliographic Information
- Other Title
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- 神経電位計測用フレキシブルシリコンプローブアレイ
- シンケイ デンイ ケイソクヨウ フレキシブルシリコンプローブアレイ
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Abstract
In order to realize long-term stable multi-channel neural recording, a micro probe array based on a flexible polyimide substrate was designed and fabricated. Each probe was formed by etching a silicon wafer using a Deep RIE equipment. This type of flexible microelectrode can be attached around the soft nervous tissue. This paper shows the fabrication process and the analysis on the flexibility of the electrode to estimate the utility for the application to tissues (brain, nerve, retina, and so on).
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 123 (12), 571-576, 2003
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390001204460225280
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- NII Article ID
- 10012557614
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 6781367
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed
