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- Nakamoto Masayuki
- Corporate R&D Center, Toshiba Corporation
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- Iwase Nobuo
- Toshiba Research Consulting Corporation
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- Ichinose Noboru
- School of Science and Engineering, Waseda University
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- Yamashita Youhachi
- Corporate R&D Center, Toshiba Corporation
書誌事項
- タイトル別名
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- Pyroelectric Infrared Sensor Using Modified PbTiO<SUB>3</SUB> Ceramics
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抄録
Pyroelectric infrared sensor using (Pb1-x, Cax)[(Co1/2W1/2)Ti]O3 ceramics have been studied by changing Ca concentration, the infrared ray absorbing film diameter, and the electromagnetic wave shielding materials for packaging. With an increase in Ca concentration from x=0.05 to 0.28, the pyroelectric coefficient P and the figure of merit Fv increased and reached 4.43×10-8 Ccm-2°C-1, and 0.61×10-10 CcmJ-1, respectively. Pyroelectric characteristics have been improved to twice the values for the PbTiO3 ceramics containing small amounts of La and Mn. The spontaneous polarization Ps of the ceramics increases to a great extent in the Ca concentration range of x=0.20-0.30, and reaches larger values of 40-42μC/cm2 than 33μC/cm2 of the c-axis oriented sputtering PbTiO3 thin film. With a decrease in the infrared ray absorbing film diameter, the responsivity Rv is improved to 140-180% in the range of 0.15-0.4Hz. The Responsivity Rv for the sensor with a Si filter window shows high values of 860 V/W.<BR>It was found that the pyroelectric infrared sensor using (Pb1-x, Cax)[(CO1/2W1/2)Ti]O3 ceramics is appropriate for use as a human body sensor.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 122 (11), 523-530, 2002
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204460251776
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- NII論文ID
- 130006274991
- 10010455189
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 6345320
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可