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- 中村 和人
- Asea Brown Boveri
書誌事項
- タイトル別名
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- Process Technology for Micromachines. Precise Hole Array Drilling of Ceramics by Excimer Laser Photo-ablation Process.
- エキシマ レーザ ニヨル セラミックス ザイリョウ ノ チョウ ビサイ アナカ
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説明
A precise drilling technology with cross section control for use on thin ceramic materials has been developed using Excimer laser photo-ablation process. An homogenous illumination optical system and projection system of high resolution optical elements are applied to a newly designed mass production system. Homogeneity of laser energy under±5% on the mask surface has been obtained by the illumination system, making a final hole array with a distribution of exit hole diameter of 3.5±0.7μm in one processing field of 1.2×1.2mm square area. If a crack occurs in the process because of high repetition rate or high energy from the laser, productivity declines. Designing a specimen holder and He-gas assist enabled cracks to be avolded even at high repetition rate of 200Hz.<br>This paper describes hole array drilling technique with cross section control of ceramics by multi musk method, production system and an application.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 117 (1), 15-19, 1997
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204460265344
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- NII論文ID
- 10004831823
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 4106303
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可