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- Wakamatsu Muneaki
- Waseda University The Graduate School of Information, Production and Systems
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- Ikezawa Satoshi
- Waseda University The Graduate School of Information, Production and Systems
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- Ueda Toshitsugu
- Waseda University The Graduate School of Information, Production and Systems
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We have developed high-sensitivity in-situ measurement technology based on photons with visible to ultraviolet wavelength bands. This measurement technology builds on plasmatizing particles technology and a high-sensitivity measurement technology for measuring photons from the plasma. Thus, we have established a technology for measuring particle sizes and the constituent element content of particles with 10% accuracy.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 127 (9), 397-402, 2007
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204460420352
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- NII論文ID
- 10019520962
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 8935245
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可