Basics and Developments of Physical Sensors

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  • フィジカルセンサの基礎と発展
  • フィジカルセンサ ノ キソ ト ハッテン

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Abstract

The physical sensors have been playing an essential role in realizing various electronic control systems. This paper describes the basics of these physical sensors including their classification, operation principals and the relevant MEMS sensors, followed by the history of their developments.

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