UV Light Transparency of Emulsion Gray-Scale Mask and 3-D Micro Machining of Photosensitive Glass

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  • Mori Ryotaro
    Faculty of Science and Technology, Department of Applied Physics and Physico-Informatics, Keio University.
  • Matsumoto Yoshinori
    Faculty of Science and Technology, Department of Applied Physics and Physico-Informatics, Keio University.

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Other Title
  • エマルジョングレイスケールマスクの紫外線透過量と感光性ガラスの3次元加工
  • エマルジョングレイスケールマスク ノ シガイセン トウカリョウ ト カンコウセイ ガラス ノ 3ジゲン カコウ

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Emulsion gray-scale masks were fabricated using three types of ink-jet printers and a 1/20 projector. Scanner was used to measure the light transparency of the printed transparency sheets and emulsion gray-scale mask. Power of UV light was measured with UV power meter especially for the wavelength of 313[nm] in which photosensitive glass absorbs well. The UV light transparency of emulsion gray-scale mask was measured with UV power meter, and the effect for the etching depth of photo sensitive glass was discussed in this paper. Then, photosensitive glass was processed by the mask and deep UV light source, and the relationship between etching depth and gray-scale value was measured. From the result, characteristics emulsion gray-scale mask of were unveiled for 3-D micro machining of photosensitive glass.

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