Development of Electrostatic Actuator for Ohmic-Contact RF MEMS Switch/Relay

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  • 有接点ＲＦ　ＭＥＭＳスイッチ／リレー用静電駆動アクチュエータの開発
  • ユウセッテン RF MEMS スイッチ リレーヨウ セイデンクドウ アクチュエータ ノ カイハツ

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A compact switch/relay with excellent high frequency performance at around 2GHz is developed by adopting a novel non-linear spring structure and high frequency signal line structure.<br>The non-linear spring system applied to an electrostatic actuator of RF MEMS switch/relay increases restoration force for switching reliability. The maximum restoration force can be three times higher than that of a linear spring system actuator. No failure due to restoration force shortage is observed during switching test up to 100 million cycles. The present RF MEMS switch/relay has been shown competitive RF performance over conventional RF switches such as PIN diodes and GaAs MMIC both by the experimental results.

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