Infrared Light Source Made of Single Crystal Silicon Microbridge
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- Karasawa Shiro
- Kanagawa Industrial Technology Research Institute
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- Ohya Seishiro
- Kanagawa Industrial Technology Research Institute
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- Yuasa Hiroyasu
- Kanagawa Industrial Technology Research Institute
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- Akimoto Kenji
- Kanagawa Industrial Technology Research Institute
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- Kodato Setsuo
- Kanagawa Industrial Technology Research Institute
Bibliographic Information
- Other Title
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- 単結晶シリコンを用いたマイクロブリッジ赤外線光源
- タンケッショウ シリコン オ モチイタ マイクロ ブリッジ セキガイ センゲン
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Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 117 (5), 239-242, 1997
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390001204460813824
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- NII Article ID
- 10005111483
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
- http://id.crossref.org/issn/13418939
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- NDL BIB ID
- 4205360
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles