書誌事項
- タイトル別名
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- Development of Low-Temperature Crystallization Process for TiNi Alloy Film by Sputtering Deposition Simultaneously with Ion Irradiation
- イオン ショウシャ ト スパッタリング ノ ドウジ プロセス オ リヨウ シタ TiNi ゴウキン ハクマク ノ テイオン ゴウセイ ギジュツ ノ カイハツ
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Sputter-deposited TiNi films had needed for a long time a post-annealing process (about 500°C) in order to have properties for shape memory alloy (SMA). A new deposition process, which incorporated simultaneous ion irradiation with multi-target RF magnetron sputtering, enabled to form crystalline TiNi films directly on a substrate at a temperature lower than 200°C. We have reported in our previous study that an SMA device was successfully fabricated on polyimide substrate without any thermal annealing. In this paper, we reveal how the energy of irradiating ion affects on lowering the optimum crystallization temperature of films. As a result, the threshold of ion energy at which crystallization comes out changes depending on plasma conditions, if the energy of irradiating ion determined only by the pulse bias voltage. However, when the energy of irradiating ion is corrected by adding the plasma potential to the bias voltage, it becomes almost constant.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 133 (10), B297-B300, 2013
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204461022976
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- NII論文ID
- 10031201005
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 024946904
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 使用不可