書誌事項
- タイトル別名
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- Experimental Analysis and Characterization on Thermal Imprint Process via In-situ Observation
- カシカ カンサツ ニ ヨル ネツ インプリントプロセス ノ トクチョウ ハアク ト ジッケンテキ コウサツ
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抄録
In this study, an experimental system for in-situ observation of the thermal imprint process was constructed, and the material behavior from the initiation of transcription to product removal was precisely studied. Based on the results obtained, effect of the temperature and pressure on the transcription behavior and the shape accuracy was investigated, and the principles to obtain good replication were discussed. In addition, the exfoliation behavior of the material from substrate in the cooling stage after the transcription was observed and its characteristics were discussed.
収録刊行物
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- 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
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電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 130 (8), 356-362, 2010
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204461042560
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- NII論文ID
- 10026498154
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 10765359
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- 抄録ライセンスフラグ
- 使用不可