High Speed Surface Micro-Polishing for Spurious Reduction of Small Quartz Crystal Blanks
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- Hatsuzawa Takeshi
- Precision and Intelligence Laboratory, Tokyo Institute of Technology
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- Hamano Hisashi
- Precision and Intelligence Laboratory, Tokyo Institute of Technology
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- Saito Masashi
- Precision and Intelligence Laboratory, Tokyo Institute of Technology
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- Yanagida Yasuko
- Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Description
Surface polishing is required for small crystal blanks to eliminate frequency spurious generated by the infinite rectangular shape. From the productivity viewpoint, bi-convex or plano-cylindrical surface are generally used to realize the energy trapping at the central part of the blanks. So far barrel polishing is the common fabrication technology to obtain bi-convex surface, however, the surface is finished insufficiently and fabrication process takes longer time as the blank size becomes small. To solve this difficulty, two types of new surface micro-polishing mechanisms with fixed abrasive and arrayed blank arrangement are experimentally examined to obtain plano-cylindrical surface. The fastest finishing time of 10 s for a blank is achieved together with the spurious elimination.
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 127 (1), 37-41, 2007
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390001204461063168
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- NII Article ID
- 10018660374
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 8626148
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed