Design, Fabrication and Operation of a Micromachined Tunneling Control Unit.
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- Kobayashi Dai
- The University of Tokyo Hitachi Cable, Ltd.
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- Fujita Hiroyuki
- The University of Tokyo
Bibliographic Information
- Other Title
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- Design Fabrication and Operation of a M
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Abstract
We developed a micro tunneling unit, a device which can control the magnitude of a tunneling current that passes through a vacuum gap by adjusting the gap distance with a microactuator. Since the unit has a tunneling tip in the direction lateral to the substrate, we call it a lateral tunneling unit (LTU). Because of its layout and fabrication process, the LTU is suitable for integrating with each other or with other microstructures on a single substrate. This paper describes the design, the fabrication, and an experimental result which shows LTU's ability to control tunneling current.
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 116 (8), 339-344, 1996
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390001204461287296
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- NII Article ID
- 130000771631
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 4037566
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed