書誌事項
- タイトル別名
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- Piezoelectric Moonie-type Resonant Microactuator
- アツデン ムーニーカタ キョウシン マイクロアクチュエータ
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<p>This paper reports a piezoelectric in-plane resonant actuator for a speckle dissolution device used in a laser-type projector. An optical diffuser is oscillated by this actuator to reduce the coherency of a scanned laser beam. A PZT unimorph actuator combined with a Moonie type displacement amplifier and a resonant structure was used to obtain a large displacement. The L18 design of experiment method was used for the optimal design. Both 1-axis and 2-axis actuators were designed and fabricated. The maximµm displacement as high as 239.5 µm at a resonance frequency of 325.2 Hz was obtained for the 1-axis actuator, and the maximµm displacements of 109.5 µm and 67 µm for both x- and y- direction at resonance frequencies of 621.5 Hz and 288.5 Hz were obtained for the 2-axis actuator (10V). The actuator was also tested with a dummy optical diffuser to evaluate the influence of the additional mass.</p>
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 137 (4), 95-100, 2017
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204461364864
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- NII論文ID
- 130005529940
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 028149934
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 使用不可