Reduction of Microvalve Leakage based on Precise Measurement of Flow Conductance
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- Hirano Motohisa
- NTT Integrated Information & Energy Systems Laboratories
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- Yanagisawa Keiichi
- NTT Integrated Information & Energy Systems Laboratories
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- Kuwano Hiroki
- NTT Integrated Information & Energy Systems Laboratories
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- Nakano Satoko
- NTT Advanced Technologies Corp.
書誌事項
- タイトル別名
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- Reduction of Microvalve Leakage based o
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説明
This paper reports a reduction of microvalve leakage according to precise measurements of the leak and flow rates. The tight contact between a valve cap and seat, which is obtained by nanometer-scale flat surfaces and by self-alignment of a cap and seat-bore, makes the leakage from a microvalve ultra-low. The leak and flow rates are determined by precisely measuring pressure changes when introducing helium gas into a flow line. We have, consequently, attained a leak rate as low as 5.8×10-10Pa⋅m3/s and a flow rate ranging from 5.8×10-10 to 3.2×10-4Pa⋅m3/s.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 117 (12), 622-626, 1997
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204461476864
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- NII論文ID
- 10004832846
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 4353775
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
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- 使用不可