High Voltage and High Resolution Surface Potential Imaging using Scanning Electrostatic Force Microscope
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- Takahashi Jun-ichi
- Ricoh Company Ltd. Research and Development Center
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- Katoh Tomomi
- Ricoh Company Ltd. Research and Development Center
書誌事項
- タイトル別名
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- High Voltage and High Resolution Surfac
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説明
A newly developed technique for high voltage surface potential imaging having high resolution capability using Scanning Electrostatic Force Microscope(SEFM) is described. It can measure both electrostatic surface potential distribution of several hundred volts on the dielectric film and topography independently and simultaneously in high resolution of some tens of μm, in the air, quantitatively and without affecting charge distribution. The result of measuring surface potential distribution formed by spark discharge on a dielectric film is shown and compared to the results by a conventional electrostatic voltmeter and by toner method.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 117 (12), 594-599, 1997
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204461481600
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- NII論文ID
- 10004832807
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 4353770
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可