Microfabricated Photocantilever for Simultaneous NSOM and AFM of optical materials
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- Fukuzawa Kenji
- NTT Interdisciplinary Research Laboratories
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- Tanaka Yuriko
- NTT Interdisciplinary Research Laboratories
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- Akamine Shinya
- NTT Interdisciplinary Research Laboratories
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- Kuwano Hiroki
- NTT Interdisciplinary Research Laboratories
書誌事項
- タイトル別名
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- Microfabricated photacantilever for simultaneous NSOM and AFM of optical materials
- Microfabricated Photocantilever for Sim
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We investigated three main advantages of the photocantilever, i.e., a microfabricated photocantilever with pn-junction type photodiode on its tip, compared to other NSOM probes. The tip of the photocantilever converts the sample-modulated evanescent light into scattered light that can be collected by the photodiode fabricated at the apex of the cantilever. We demonstrated efficient collection of the scattered light, i.e., the NSOM signal light, availability of simultaneous NSOM/AFM microscopy, and the good responsivity to visible light. The photocantilever-based NSOM signal is one order of magnitude larger than that reported for AFM-cantilever-based NSOM. The minimum detectable NSOM power that we obtained was several tens of pico watts. By locating the optical-lever laser spot for AFM regulation over 100μm from the pn-junction, the photocurrent generated by the laser spot can be reduces for NSOM measurement. This enables simultaneous NSOM/AFM using the photocantilever. The resultant NSOM lateral resolution is better than 20nm (λ/30) and vertical resolution is better than 5nm. The spectral response shows that the photocantilever responds to visible light and the spectral response has a peak at about 500nm. The photocantilever enables simultaneous near-field scanning optical microscopy and atomic force microscopy, which measure both optical and topographical distributions with nanometer-resolution.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 116 (4), 136-142, 1996
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204461609088
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- NII論文ID
- 130000771653
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 3966832
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 使用不可