SAMトランスファー法を用いた薄膜構造体の樹脂基板への転写技術

DOI Web Site Web Site 参考文献5件

書誌事項

タイトル別名
  • Fabrication of Thin Film Capacitors Embedded in Flexible Polymer by SAM Transfer Methods
  • SAM トランスファーホウ オ モチイタ ハクマク コウゾウタイ ノ ジュシ キバン エ ノ テンシャ ギジュツ

この論文をさがす

説明

In this paper, we propose the method that PZT thin layer, which is formed on a Si substrate, can be transferred to polydimethylsiloxane (PDMS) without additional chemical contamination. In consideration of embedding in the substrate more easily, sandwich structures of PZT between two metal layers are used as thin-film capacitor. To embed PZT in the PDMS substrate by dry process, 3-mercaptopropyltrimethoxysilane (MPTMS) is used in this process as the molecular glue. MPTMS was coated on the upper electrode, gold, as an adhesive layer between gold and PDMS. As a result, the sample with thickness of 300 nm that was treated with MPTMS is embedded in PDMS.

収録刊行物

参考文献 (5)*注記

もっと見る

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ