Numerical Analysis for Evaluating Adhesion of Arbitrary-shaped Microstructures Using Optimization Method
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- Tezuka Shin-ichirou
- Yokogawa Electric Corporation
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- Kato Satoshi
- Yokogawa Electric Corporation
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- Hamanaka Hitoshi
- Yokogawa Electric Corporation
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- Watanabe Tetsuya
- Yokogawa Electric Corporation
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- Iwaoka Hideto
- Yokogawa Electric Corporation
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Description
This paper discusses a method of analyzing the adhesion problem of arbitrary-shaped microstructures using FEM and an optimization. We have applied our method to square plates, and obtained realistic curved adhesion shapes. We fabricated square plates as test samples, and calculated γs of these samples by using our method. Adhesion criteria are also derived by numerical calculation. We then redesigned the adhesion samples by applying this method, and subsequent tests showed no adhesion of the samples.
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 122 (9), 427-432, 2002
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390001204461926528
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- NII Article ID
- 130005403990
- 10009583722
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 6284165
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed