書誌事項
- タイトル別名
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- Equivalent RF Circuit Model on Fluid MEMS Capacitors
- リュウタイ MEMS キャパシタ ノ コウシュウハ トウカ カイロ モデル ノ ケントウ
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There exists a growing demand on high performance variable filters for multi-function, multi-band wireless systems used in wide variety of applications. A variable capacitor with high capacitance ratio (CR) is one of the key devices to realize such controllable/reconfigurable filters. This paper reports the device structure, fabrication process, and the performance of a very high CR variable capacitor using pure water as dielectric material. The device holds two reservoir cells and was fabricated by microelectromechanical systems (MEMS) technology. It exhibited three digitally-stepped capacitances; varied from 0.93 pF to 32.9 pF (CR=35), then to 74.4 pF (CR=80) at 1 MHz by filling each of the cells with pure water. In order to confirm the electrical behavior for such a fluid MEMS capacitor, its microwave performance was evaluated. An equivalent RF circuit model with 9 elements has been introduced and the device performance was successfully simulated up to 4 GHz. It is also confirmed that the 3 step capacitance values stay effective in the same frequency range.
収録刊行物
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- 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
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電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 131 (1), 35-39, 2011
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204462354432
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- NII論文ID
- 10027637470
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 10934926
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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