低フラックス原子状酸素ビームとポリイミド薄膜との表面反応 2  紫外線の同時照射効果

  • 田川 雅人
    大阪大学大学院工学研究科物質・生命工学専攻
  • 末冨 徹
    大阪大学大学院工学研究科物質・生命工学専攻
  • 木之下 博
    大阪大学大学院工学研究科物質・生命工学専攻
  • 梅野 正隆
    大阪大学大学院工学研究科物質・生命工学専攻
  • 大前 伸夫
    神戸大学工学部機械工学科

書誌事項

タイトル別名
  • The Surface Reaction of a Low Flux Atomic Oxygen Beam with a Spin-Coated Polyimide Film: The Effect of Simultaneous UV Irradiation.
  • The Effect of Simultaneous UV Irradiation
  • 紫外線の同時照射効果

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説明

The synergistic effect of atomic oxygen and ultraviolet rays on the spin-coated polyimide film is investigated. The X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy suggest that the formation of carbonyl group at the film surface occurs during atomic oxygen exposures. The mass loss of the polyimide film and the enhancement carbon dioxide formation are observed during simultaneous irradiation of the low flux atomic oxygen and ultraviolet rays. These experimental results are explained by the photo-assisted chemical reaction of carbonyl groups formed by atomicoxygen attack. The fact that the synergistic effect of atomic oxygen and ultraviolet rays is obvious on the polyimide film, which is known as the material showing no synergistic effect in low Earth orbit, may reveal the importance of relative intensities of atomic oxygen and ultraviolet rays on the ground-based synergistic testing of the materials.

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