Development of Laser-Assisted Wide Angle 3D Atom Probe

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  • Hanaoka Yuya
    Institute of Industrial Science, The University of Tokyo
  • Mayama Norihito
    Institute of Industrial Science, The University of Tokyo
  • Terakawa Tetsuo
    Institute of Industrial Science, The University of Tokyo
  • Yamamoto Takuya
    Institute of Industrial Science, The University of Tokyo
  • Kajiwara Yasuko
    Institute of Industrial Science, The University of Tokyo
  • Iwata Tatsuo
    Department of Electrical and Electronic Engineering, Mie University
  • Taniguchi Masahiro
    Division of Applied Chemistry, Department of Bioengineering and Chemistry, Kanazawa Institute of Technology
  • Owari Masanori
    Institute of Industrial Science, The University of Tokyo Environmental Science Center, The University of Tokyo

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Laser-assisted wide angle three dimensional atom probe (3DAP) has been developed in our laboratory [1]. In this study, in order to reconstruct three dimensional arrangement of atoms in more detail, the cryogenerator and field ion microscope (FIM) were installed in our 3DAP instrument, and our original preset-type specimen stage was improved. By analyzing the pure tungsten specimen with our improved 3DAP instrument, the improvement of the mass resolution and sharpening of the desorption and tomographic images were attained. Then, it was confirmed that the rising of the temperature by the laser irradiation might be suppressed by cooling down the specimen under 100 K.

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