高速光電子顕微鏡測定のためのポリキャピラリーレンズを用いた軟X線の集光

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  • Quick Observation of Photoelectron Emission Microscopy with Focused Soft X-rays using Poly-capillary Lens

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In order to study dynamic phenomena in a microscopic region of solid surfaces, it is important to observe element, chemical-state, and molecular-orientation mappings at nanometer scale in a short time. In the previous study, we have developed a photoelectron emission microscopy (PEEM) system combined with soft X-rays from synchrotron light source, and demonstrated that the method can be applied to the observation on chemical-state mapping of silicon compounds at nanometer scale [1]. In the present work, in order to apply this method to the observation of fast phenomena, we explored the focusing of soft X-ray (1.8 - 4 keV) using a poly-capillary lens, and examined the minimum measuring time by PEEM. By adjusting the poly-capillary lens, the brightness of the measuring spot by PEEM became about 55 times higher than that without the lens. Consequently, we can take a PEEM image of a bulk sample in 10 msec. The measuring times for elemental mapping and chemical-state mapping were also examined by scanning the energy of X-ray. As a result, the typical minimum measuring times were in the order of 10 sec for elemental mapping and one minute for chemical-state mapping. It is demonstrated that the method will be applicable to the real-time observation of time-dependent phenomena in the order from msec to sec at nanometer scale.

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