SEM画像の三次元画像構築技術

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タイトル別名
  • The three-dimensional image construction technology for the SEM image.
  • SEM ガゾウ ノ 3ジゲン ガゾウ コウチク ギジュツ

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抄録

A supercomputer based software, which enables re-construction of a three-dimensional shape without human assistance using a stereo-pair of scanning electron micrographs, has been developed. It is based upon computer image processing and pattern recognition techniques, and can re-construct a three-dimensional shape of a wide variety of fracture surfaces of corrosion fatigue as well as crack initiation sites in an aggressive environment like a corrosion pit. We discuss the optimum algorithm according to the morphology of fracture surfaces. A sequential similarity detection algorithm is available in transgranular fatigued surfaces, whereas in the case of corrosion fatigue fracture surfaces and crack initiation sites, the mutual correlation coefficient technique is well suited. The shape and size of the window area, and the run time required in re-construction are also discussed.

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