A Direction Sensing Technique of a Reference Point by Using Cross-Hair Diffraction Beam

DOI DOI Web Site Open Access

Bibliographic Information

Other Title
  • 十字回折ビームを用いた基準点の方向検出法

Description

We describe a technique for measuring the direction of a reference point easily and accurately. In the method, cross-hair diffraction beam, corner cube and an XY-scanner driven by piezo stacks are used. The accuracy for angular detection was about 10μ rad.

Journal

Keywords

Details 詳細情報について

Report a problem

Back to top