十字回折ビームを用いた基準点の方向検出法

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書誌事項

タイトル別名
  • A Direction Sensing Technique of a Reference Point by Using Cross-Hair Diffraction Beam

説明

We describe a technique for measuring the direction of a reference point easily and accurately. In the method, cross-hair diffraction beam, corner cube and an XY-scanner driven by piezo stacks are used. The accuracy for angular detection was about 10μ rad.

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