高分解能化された自動化副尺法による光学的変位計測系

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  • High Resolution Optical Displacement Measuring System by Improved Automated Vernier Scale Method
  • コウ ブンカイノウカサレタ ジドウカ フクシャクホウ ニ ヨル コウガクテキ

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The scales of the Vernier calipers widely used in precise length measurement are a combination of a main scale and a Vernier scale, which are two kinds of scales with wide different pitch scale lines. The scale combination makes it possible to measure the length in higher resolution than the original scale line pitch.<br>In this paper, the above concept of the Vernier calipers is introduced to a new displacement measuring system for high resolution and high accuracy. In this system, the main and Vernier scales are replaced with light sources and photosensors to make automatic scale reading (this is called automated Vernier scale method). The measured displacement is given in the discrete interval, so the measuring resolution is limited with respect to the width of the discrete interval. To improve this resolution limit, we propose two algorithms utilizing analog data processing without any change of the hardware construction. They are the first order moment algorithm and the phase discrimination algorithm.<br>To examine the improved automated Vernier scale method, we construct an experimental measuring system. The main scales are replaced with photosensor array of twenty sensors at intervals of 0.5mm. The Vernier scales are replaced with light beams of a laser diode scanned by a polygon mirror. As the experimental results, the repeatable accuracy of the measurement was ±3∼4μm within 5mm of measuring range.

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