Continuous-time Robust Deadbeat Control of Automatic Guided Vehicle
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- SAWADA Kenji
- Graduate School of Informatics and Engineering, The University of Electro-Communications
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- IKAWA Tatsuya
- NTT EAST, Co.
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- SHIN Seiichi
- Graduate School of Informatics and Engineering, The University of Electro-Communications
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- KUMAGAI Kenji
- Murata Machinery, Ltd., Tokyo Office Research & Development
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- YONEDA Hisato
- Murata Machinery, Ltd., Tokyo Office Research & Development
Bibliographic Information
- Other Title
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- 半導体搬送用台車の連続時間ロバスト有限時間整定制御
- ハンドウタイ ハンソウヨウダイシャ ノ レンゾク ジカン ロバスト ユウゲン ジカン セイテイ セイギョ
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Abstract
This paper describes synthesis of continuous-time robust deadbeat control for automatic guided vehicle (AGV) in semiconductor manufacturing. Since the dynamics of AGV depends on the loading weight of semiconductor wafer, it is necessary to consider control synthesis which focuses on the change of the loading weight for high-accuracy positioning. In addition to this, the big overshoot and the saturating servo motor current of AGV should be avoided. Motivated by above, first, this paper provides the modeling of AGV. Second, this paper describes robust deadbeat control designs. We discuss the design of the cascade control system which is composed of the servo controller and the deadbeat one. Finally, this paper examines the effectiveness of the proposed systems through numerical examples.
Journal
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- Transactions of the Society of Instrument and Control Engineers
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Transactions of the Society of Instrument and Control Engineers 49 (2), 246-254, 2013
The Society of Instrument and Control Engineers
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Details 詳細情報について
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- CRID
- 1390001204504324864
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- NII Article ID
- 10031154993
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- NII Book ID
- AN00072392
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- ISSN
- 18838189
- 04534654
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- NDL BIB ID
- 024320927
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed