Gas-Phase Conversion of Tetramethoxysilane to Trimethoxysilane
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- Kojima Toshinori
- Department of Applied Chemistry, Seikei University
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- Uchiyama Tsuyoshi
- Department of Applied Chemistry, Seikei University
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- Murata Daisuke
- Department of Applied Chemistry, Seikei University
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- Kato Shigeru
- Department of Applied Chemistry, Seikei University
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- Watanabe Yoshiyuki
- Research & Development Division, JGC Corp.
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- Shibuya Hiromitsu
- Research & Development Division, JGC Corp.
Bibliographic Information
- Other Title
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- テトラメトキシシランからトリメトキシシランへの気相転換
- テトラメトキシシラン カラ トリメトキシシラン エ ノ キソウ テンカン
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Abstract
The possibility of gas-phase conversion of tetramethoxysilane to trimethoxysilane was thermodynamically and experimentally evaluated. Tetramethoxysilane is a byproduct of a proposed process for production of polycrystalline silicon from trimethoxysilane without using chlorine compounds. It was found that a trimethoxysilane yield of more than one percent is possible under conditions of 0.1 MPa and 1023 K with a Si–Cu catalyst.
Journal
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- KAGAKU KOGAKU RONBUNSHU
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KAGAKU KOGAKU RONBUNSHU 31 (2), 115-117, 2005
The Society of Chemical Engineers, Japan
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Details 詳細情報について
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- CRID
- 1390001204508818944
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- NII Article ID
- 130000018647
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- NII Book ID
- AN00037234
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- COI
- 1:CAS:528:DC%2BD2MXivFyhu74%3D
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- ISSN
- 13499203
- 0386216X
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- NDL BIB ID
- 7350208
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed