Development of Ultra Low Dew-point Clean Air Generator.

DOI Web Site Web Site 6 References

Bibliographic Information

Other Title
  • 超低露点清浄空気発生装置の開発
  • チョウテイロテン セイジョウ クウキ ハッセイ ソウチ ノ カイハツ

Search this article

Description

To reduce the manufacturing cost of semiconductors, some systems have been proposed that use a cheap and high purity Clean Dry Air (CDA) CDA can reduce process step such as wafer cleaning, because CDA flow in stocker prevents the wafer surface from adsorbing of moisture and organic impurities. We have already optimized a two-stage rotary dehumidifier and have conducted a study of methods for cheaply manufacturing air that has a low dew-point of -70°C to -50°C. We have further developed the method in which a dry dehumidifier is used, and developed an ultra low dew-point air generator. The air generator is a three-stage rotary dehumidifier in which a further stage is added to the two-stage rotary dehumidifier. The main component of the rotors is metal silicate. The air generator can supply dry air with a dew point of -110°C. or less, in which the concentration in all gaseous contaminants is far below 1 ppb. We made a trial calculation of the manufacturing cost, and an average cost of 0.25 yen/m3 was obtained.

Journal

References(6)*help

See more

Keywords

Details 詳細情報について

Report a problem

Back to top