アークエネルギーによる酸化物超微粒子生成法の研究

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タイトル別名
  • A Study of a Generation Process of Oxide Ultra Fine Particles with Arc Energy.
  • アーク エネルギー ニヨル サンカブツ チョウ ビリュウシ セイセイホウ ノ

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抄録

A generating process for oxide ultra fine particles (UFP), particulary SiO2 and In3O3 is studied using an arc discharge method with a shield gas nozzle as an electrode. The arc is generated between the tungsten electrode cathode and a bulk material anode in an argon-oxygen atmosphere and an argon gas flowing in the shield gas nozzle. Pure Si and In are used as the bulk materials.<br>The results obtained are as follows:<br>(1) SiO2 UFP of high purity are obtained by shielding the tungsten electrode with argon gas.<br>(2) Oxygen content in the mixed gas, to obtain In2O3 UFP of high purity, is about 10vol% at 125g/h of the generation rate with a 100A current.<br>(3) A composition of In2O3-SnO2 complex UFP that can be obtained using this method is definitely affected by the vapor pressure of the bulk metal oxides.

収録刊行物

  • 粉体工学会誌

    粉体工学会誌 32 (12), 874-880, 1995

    一般社団法人 粉体工学会

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