副生粒子を伴う気相反応法超微粒子生成系からの目的粒子の高温静電回収

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タイトル別名
  • Electrostatic separation of CVD ultrafine particles at high temperature.
  • フクセイ リュウシ オ トモナウ キソウ ハンノウホウ チョウ ビリュウシ セ

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抄録

The feasibility of electrostatic precipitation at high temperature was demonstrated for the separation of the ultra-fine particles synthesized by thermally activated CVD ( Chemical Vapor deposition) from the reaction gas stream. Silicon nitride particles were prepared from a SiCl4/NH3 system at 1200°C. This process produces the NH4Cl by-product which is a solid particle at normal temperature. Using the high temperature electrostatic precipitation method, it is expected that the Si3N4 product can be collected without the by-product (NH4Cl) from reaction gas because the sublimation temperature of NH4Cl is about 340°C. The new electrode system for corona discharge was developed because stable corona discharge was not obtained in the reaction gas atmosphere at high temperatures. The X-ray diffraction shows that the particles collected on the electrode at 500°C contains no NH4Cl particle.

収録刊行物

  • 粉体工学会誌

    粉体工学会誌 26 (3), 163-168, 1989

    一般社団法人 粉体工学会

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