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- 山本 英夫
- 東京大学生産技術研究所
書誌事項
- タイトル別名
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- Electrostatic separation of CVD ultrafine particles at high temperature.
- フクセイ リュウシ オ トモナウ キソウ ハンノウホウ チョウ ビリュウシ セ
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The feasibility of electrostatic precipitation at high temperature was demonstrated for the separation of the ultra-fine particles synthesized by thermally activated CVD ( Chemical Vapor deposition) from the reaction gas stream. Silicon nitride particles were prepared from a SiCl4/NH3 system at 1200°C. This process produces the NH4Cl by-product which is a solid particle at normal temperature. Using the high temperature electrostatic precipitation method, it is expected that the Si3N4 product can be collected without the by-product (NH4Cl) from reaction gas because the sublimation temperature of NH4Cl is about 340°C. The new electrode system for corona discharge was developed because stable corona discharge was not obtained in the reaction gas atmosphere at high temperatures. The X-ray diffraction shows that the particles collected on the electrode at 500°C contains no NH4Cl particle.
収録刊行物
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- 粉体工学会誌
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粉体工学会誌 26 (3), 163-168, 1989
一般社団法人 粉体工学会
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詳細情報 詳細情報について
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- CRID
- 1390001204513368320
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- NII論文ID
- 130003777180
- 40004189932
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- NII書誌ID
- AN00222757
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- ISSN
- 18837239
- 03866157
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- NDL書誌ID
- 3220952
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可