IT-CCDイメージセンサにおける光学的なセル縮小限界

DOI 被引用文献2件 参考文献5件

書誌事項

タイトル別名
  • Optical Limitations to Cell Size Reduction in IT-CCD Image Sensors

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説明

We have determined the practical limits of cell size reduction in interline-transfer CCD image sensors, limits resulting from diffraction occurring at the aperture above the photodiode. We have found that image cell size cannot be reduced to a level for which aperture width would fall below about 0.2 μm. We have also found, however, that image cells with greater than 0.2 μm aperture size are sensitive over the entire wavelength range of visible light, and that sensitivity can be increased by thinning the photoshield film.

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被引用文献 (2)*注記

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参考文献 (5)*注記

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詳細情報 詳細情報について

  • CRID
    1390001204520508160
  • NII論文ID
    110003680174
  • NII書誌ID
    AN00352231
  • DOI
    10.11485/tvtr.20.23_19
  • ISSN
    24330914
    03864227
  • 本文言語コード
    ja
  • データソース種別
    • JaLC
    • CiNii Articles
  • 抄録ライセンスフラグ
    使用不可

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