Analysis on Characteristics of Light Transmission for Multiple-metal Layer Nano-meter CMOS
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- Ikeda Makoto
- VLSI Design and Education Center, University of Tokyo
Bibliographic Information
- Other Title
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- 微細CMOSの多層配線における光学特性の評価(携帯電話用カメラ,デジタルスチルカメラ,ビデオカメラ(ハイビジョン)とそのためのイメージセンサ,モジュール,特別企画「CCD誕生40周年記念講演-黎明期-」)
- 微細CMOSの多層配線における光学特性の評価
- ビサイ CMOS ノ タソウ ハイセン ニ オケル コウガク トクセイ ノ ヒョウカ
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Description
This presentation introduces analysis and evaluation on light transmission characteristics through multiple-metal layers of nano-meter CMOS. We have calculated light transmission characteristics using light transmission matrix and evaluated with 12 metal layer 65nm CMOS. We have measured polarization characteristics through metal wire grid, which is well explained by the simple optical model for wire grid polazation.
Journal
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- ITE Technical Report
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ITE Technical Report 34.38 (0), 21-24, 2010
The Institute of Image Information and Television Engineers
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Keywords
Details 詳細情報について
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- CRID
- 1390001204529380608
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- NII Article ID
- 110007817789
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- NII Book ID
- AN1059086X
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- ISSN
- 24241970
- 13426893
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- NDL BIB ID
- 10859426
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL Search
- CiNii Articles
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- Abstract License Flag
- Disallowed