1.12um Cell Low-Noise Front Side Illumination Image Sensors with Light Pipe : SmartFSI^[○!R]

DOI Web Site 6 References
  • SENGOKU Naohisa
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • HIRATA Tatsuya
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • TACHIKAWA Keishi
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • NAKAMURA Tetsuya
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • WATANABE Hisashi
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • MIYAGAWA Ryohei
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • OHTSUKI Hirohisa
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • OHNO Shigeyuki
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • TAKEDA Tomotsugu
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • YAMAMOTO Kouichi
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • SUZUKI Shigeru
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • YANO Hisashi
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • ORIGASA Ken-ichi
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • AMIKAWA Hiroyuki
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • OGITA Shin-ichi
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • MORI Yoshiya
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • SASAKI Yoshimitsu
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • MURAKAMI Masashi
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation
  • TERANISHI Nobukazu
    Image Sensor Business Unit, Industrial Devices Company, Panasonic Corporation

Bibliographic Information

Other Title
  • 1.12umセル低ノイズ表面照射型導波路構造イメージセンサ : SmartFSI^[○!R](固体撮像技術および一般～IEDM, SPIE EI, ISSCC特集～)
  • 1.12umセル低ノイズ表面照射型導波路構造イメージセンサ : SmartFSI
  • 1.12um セル テイノイズ ヒョウメン ショウシャガタ ドウハロ コウゾウ イメージセンサ : SmartFSI

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Description

We have developed 1.12um cell size low-noise front side illumination (FSI) CMOS image sensor with light pipe: SmartFSI^[○!R]. Adopting unique bended light pipe structure, and optimizing cell layout and potential profile in photo diode, we realized quite high quantum efficiency (QE) of 72% and low read-out noise of 0.9ele, which exceeds the performance of backside illumination (BSI) image sensors.

Journal

  • ITE Technical Report

    ITE Technical Report 37.19 (0), 1-4, 2013

    The Institute of Image Information and Television Engineers

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