Influence of the Concentration of the Chlorine Ion in the Polybenzoxazole Precursors on the Corrosion of Metals

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  • IKEDA Osamu
    Sony Corporation, Micro Systems Network Company, Core Technology Development Group, Corrosion Analysis Center
  • ITOH Fuminari
    Sony Corporation, Micro Systems Network Company, Core Technology Development Group, Corrosion Analysis Center
  • HASEGAWA Masatoshi
    Department of Chemistry, Faculty of Science, Toho University

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Other Title
  • ポリベンゾオキサゾール前駆体中の塩素イオン濃度のコロージョンへの影響

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Polybenzoxazoles (PBO) precursors consisting of bis (3-hydroxy-4-amino) biphenyl (p-HAB), 2, 2'-bis (3-amino-4-hydroxyphenyl) hexafluoropropane (AH6FP), and terephthaloyl choloride (TPC) showed high solubility in common organic solvents. PBO precursors were polymerized from silylated p-HAB (50mol-%), AH6FP (50mol-%), and TPC (100mol-%), in NMP containing LiCl (about 1 wt-%) . The PBO precursor was precipitated in a large excess of water to remove some ionic impurities and to refine it. The concentration of the chlorine ion in the PBO precursors analyzed by ion chromatography was about 500 ppm, after the precipitate was repeatedly washed with fresh water. The corrosion of copper or silver metals was significantly suppressed.

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