Multilayer Infrared Anti-Reflection and Hard Coating on Polycrystal Gallium Arsenide
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- Nagashima Mitsuhiro
- Electronics Systems Research Center, TRDI, Ministry of Defense
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- Wada Hideo
- Electronics Systems Research Center, TRDI, Ministry of Defense
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We have designed and prepared the multilayer anti-reflection (AR) and diamond-like carbon (DLC) hard coatings for a large scale polycrystal gallium arsenide (Poly-GaAs) infrared optical window to improve its transmittance and surface hardness. The coatings were deposited on 100 mm diameter Poly-GaAs substrates and their optical properties were analyzed. The optimum optical designs are found to be IRX/Ge/YF3 with buffer layer Y2O3 for AR coating, and DLC/Ge/Y2O3 and DLC/BP for DLC hard coating, respectively. Their transmittances are 98% for AR coating and 85-87% for DLC coating, which are 5-10% higher than the values for the conventional infrared protective ZnS windows used for airborne infrared thermal imaging systems.
収録刊行物
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- 電気学会論文誌． Ａ
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電気学会論文誌． Ａ 127 (7), 375-381, 2007
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204593610624
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- NII論文ID
- 10019523398
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- NII書誌ID
- AN10136312
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- ISSN
- 13475533
- 03854205
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- NDL書誌ID
- 8878143
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
