Characterization of Pulsed High-Current Generator for Extreme Ultraviolet Generation

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  • Oshima Nobuaki
    Extreme Energy-Density Research Institute, Nagaoka University of Technology
  • Inokuchi Syouichi
    Extreme Energy-Density Research Institute, Nagaoka University of Technology
  • Kimura Toru
    Extreme Energy-Density Research Institute, Nagaoka University of Technology
  • Jiang Weihua
    Extreme Energy-Density Research Institute, Nagaoka University of Technology
  • Yatsui Kiyoshi
    Extreme Energy-Density Research Institute, Nagaoka University of Technology
  • Tokuchi Akira
    Nichicon Corporation

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Description

The characteristics of a pulsed high-current generator has been studied for applications in extreme ultraviolet (EUV) generation. The objective is to clarify the electrical response of the generator circuit to the dynamic behavior of the discharge load. The experiments were carried out by driving a capillary discharge, where the plasma behavior is monitored by using high-speed camera and photodiodes. The generator performance is monitored by voltage and current probes. From the diagnostic results, the behavior of the last magnetic switch has become clear and the electrical efficiency of the generator system is obtained. The energy deposited in the capillary is calculated to be 4.5 J and the temporary plasma impedance at the peak current is observed to be 40 mΩ.

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