イオンビームスパッタ法によるダイヤモンド状炭素膜の耐摩耗性

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書誌事項

タイトル別名
  • Wear and Friction Behavior of Diamond-Like-Carbon Films Prepared by an Ion-Beam Sputter Deposition
  • イオン ビーム スパッタホウ ニ ヨル ダイヤモンドジョウ タンソ マク ノ

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説明

Wear and friction behavior of diamond-like-carbon (DLC) films prepared by an ion-beam sputter deposition under different conditions were studied. Plastics or magnetic films were covered by DLC films which was deposited at room temperature. The thickness of these films were about 20 nm. Double-layered DLC films (a layer of lubricant deposited by using argon ion-beam on a highly stable layer of film deposited by using argon and hydrogen ion-beam) exhibited low friction coefficient (μ=0.16) and long life time (> 103 cycles under the weight of 20 g). It was noted that the DLC thin films on the flexible substrates were highly lubricating and stable.

収録刊行物

  • 応用物理

    応用物理 56 (2), 256-262, 1987

    公益社団法人 応用物理学会

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