Wear and Friction Behavior of Diamond-Like-Carbon Films Prepared by an Ion-Beam Sputter Deposition

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  • HIROCHI Kumiko
    Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.
  • KITABATAKE Makoto
    Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.
  • YAMAZAKI Osamu
    Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.

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Other Title
  • イオンビームスパッタ法によるダイヤモンド状炭素膜の耐摩耗性
  • イオン ビーム スパッタホウ ニ ヨル ダイヤモンドジョウ タンソ マク ノ

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Description

Wear and friction behavior of diamond-like-carbon (DLC) films prepared by an ion-beam sputter deposition under different conditions were studied. Plastics or magnetic films were covered by DLC films which was deposited at room temperature. The thickness of these films were about 20 nm. Double-layered DLC films (a layer of lubricant deposited by using argon ion-beam on a highly stable layer of film deposited by using argon and hydrogen ion-beam) exhibited low friction coefficient (μ=0.16) and long life time (> 103 cycles under the weight of 20 g). It was noted that the DLC thin films on the flexible substrates were highly lubricating and stable.

Journal

  • Oyo Buturi

    Oyo Buturi 56 (2), 256-262, 1987

    The Japan Society of Applied Physics

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