接触面顕微鏡による薄膜の耐摩耗試験

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書誌事項

タイトル別名
  • New Wear Testing of Thin Films with Contact Microscope
  • セッショクメン ケンビキョウ ニ ヨル ハクマク ノ タイ マモウ シケン

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抄録

New wear testing method for thin films was proposed. A small amplitude (10 mm) oscillating sliding wear tester was combined with a contact microscope. The substrate thin film deposited on, was pressed on the prism surface of the contact microscope. When some area of thin films worn away, the image of real contact area with the microscope changed clear at that area. Therefore, the area thin films worn away was easily distinguished with the microscope. The sensitivity of this new method is high enough to examine the wear resistance of thin films thinner than 100 nm.

収録刊行物

  • 応用物理

    応用物理 56 (8), 1087-1089, 1987

    公益社団法人 応用物理学会

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