EELS機能付き透過電子顕微鏡によるポリエチレンの分析

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  • TEM Analysis of Polyethylene with EELS
  • EELS キノウ ツキ トウカ デンシ ケンビキョウ ニ ヨル ポリエチレン

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This paper describes transmission electron microscope (TEM) analysis of polyethylene in terms of electron energy loss spectroscopy (EELS) in order to evaluate the mean free path of high energy electrons. The mean free path is one of the basic properties due to pylyethylene-electron interactions and is useful to characterize the material. The mean free path was correlated with polyethylene specimens with various mean density. For the first step, the mass thickness (the relative thickness to the mean free path) was evaluated through EELS data and then the real thickness of the specimens was measured by the side view of the specimen through TEM observation. Finally, the mean free path in polyethylene was evaluated to be about 500 nm at electron energy of 200 keV with an electron beam radius of 10 nm. The mean free path slightly depends on the specimen density.

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