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- 内田 諭
- 北海道大学
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- 菅原 広剛
- 北海道大学
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- Ventzek Peter L.G.
- 北海道大学
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- 酒井 洋輔
- 北海道大学
書誌事項
- タイトル別名
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- A Boltzmann Equation Analysis of Electron Swarm Parameters and Properties of Excited Particle Number Densities in Xe/Ne Plasmas -Laser Absorption Effect-
- Xe Ne プラズマチュウ デンシ ユソウ ケイスウ ナラビニ レイキ リュウ
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説明
Xe/Ne plasmas are important for plasma display panels and VUV light sources. However, reactions between electrons and excited particles in the mixtures are so complicated that influence of the reactions on the plasma properties is not understood well. In this work, taking account of reactions through which electrons are produced, such as cumulative and Penning ionization, and of transition between excited levels, the electron and excited particle properties in Xe/Ne plasmas are calculated using the Boltzmann equation. The ionization coefficient and electron drift velocity agreed with experimental data. The influence of laser absorption in Xe/Ne plasmas on the plasma properties is also discussed.
収録刊行物
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- 電気学会論文誌. A
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電気学会論文誌. A 118 (6), 622-628, 1998
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204598417792
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- NII論文ID
- 130006838361
- 10004439788
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- NII書誌ID
- AN10136312
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- ISSN
- 13475533
- 03854205
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- NDL書誌ID
- 4492015
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- データソース種別
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- JaLC
- NDL
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