Xe/Neプラズマ中電子輸送係数ならびに励起粒子数密度特性の ボルツマン方程式解析ーレーザ光吸収効果-

DOI Web Site Web Site 被引用文献2件 参考文献24件

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タイトル別名
  • A Boltzmann Equation Analysis of Electron Swarm Parameters and Properties of Excited Particle Number Densities in Xe/Ne Plasmas -Laser Absorption Effect-
  • Xe Ne プラズマチュウ デンシ ユソウ ケイスウ ナラビニ レイキ リュウ

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Xe/Ne plasmas are important for plasma display panels and VUV light sources. However, reactions between electrons and excited particles in the mixtures are so complicated that influence of the reactions on the plasma properties is not understood well. In this work, taking account of reactions through which electrons are produced, such as cumulative and Penning ionization, and of transition between excited levels, the electron and excited particle properties in Xe/Ne plasmas are calculated using the Boltzmann equation. The ionization coefficient and electron drift velocity agreed with experimental data. The influence of laser absorption in Xe/Ne plasmas on the plasma properties is also discussed.

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