Change of anode surface exposed to a low pressure discharge and change of a secondary electron emission yield

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  • 低気圧放電による陽極表面変化と二次電子放出係数
  • テイキアツ ホウデン ニ ヨル ヨウキョク ヒョウメン ヘンカ ト 2ジ デンシ ホウシュツ ケイスウ

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Abstract

The authors have studied about the electron multiplication mechanism of discharge in the left side of the Paschen minimum. In this region, ionization by electron collision, so called a effect, is not so expected to sustain steady state discharge. Then, other electron supply processes may be important to maintain discharge in the region. The authors paid attention to the anode. Because, electrons with high energy accelerated in the space bombard the anode surface and many secondary electrons or reflected electrons may be generated.<br>In this study, chemical change of sample exposed to the high E/n discharge was detected by the XPS (X-ray Photoelectron Spectroscopy) and a yield of electrons at the sample surface was also measured. From the results, a qualitative relationship between the composition of element deposited at sample surface and the yield change was obtained.

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