プリパルス/PFN回路方式XeClエキシマレーザの動作解析

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  • Theoretical Analysis of XeCl Excimer Laser with the Pre-pulse/PFN Circuit
  • プリ パルス PFN カイロ ホウシキ XeCl エキシマ レーザ ノ ドウサ

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Theoretical analysis of XeCl excimer laser with the pre-pulse/PFN (pulse forming network) circuit is described, . In this analysis, we assume a zero-dimensional uniform discharge plasma, and a breakdown in the gap is produced only by self-avalanche electron multiplication process. <br>This circuit has different characteristics from the charge transfer circuit, that are a long laser pulse width of about 340ns, a complex evolution of the voltage between the electrode gap, and a relatively low partial component of Xe and HCl gas. However, the theoretical analysis for this circuit does not have been well studied. <br>The results of this analysis are as follows, (1) the role of the pre-pulse circuit is not only the initiation of the breakdown but also the raise of initial laser power, (2) the transferred energy from the PFN to the discharge is more than 80% of the charged energy on the PFN, (3) the temporal evolution of the electron multiplication during long pulse discharge period is explained, (4) the small signal gain and the absorption loss are estimated as about 3%/cm and 0.07%/cm, respectively.

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