低<i>E/N</i>領域の電子付着係数とKrFレーザ励起放電の不安定性に関する一考察

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タイトル別名
  • Electron Attachment Coefficient in Low <i>E/N</i> Regions and a Discussion of Discharge Instability in KrF Laser
  • 低E/N領域の電子付着係数とKrFレーザ励起放電の不安定性に関する一考察--対数変換ボルツマン方程式による解析
  • テイ E N リョウイキ ノ デンシ フチャク ケイスウ ト KrF レーザ
  • 対数変換ボルツマン方程式による解析
  • Analysis by Logarithm Transformed Boltzmann Equation

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The Boltzmann equation used in a theoretical analysis of an excimer laser is discussed for finding an electron-energy distribution function in low reduced electric field strength below 0.5Td and clarifying the dependence of the electron attachment coefficient on the laser gas mixtures. Based on both numerical and experimental results, the generation of the discharge instability of a KrF laser is also discussed. Electron-energy distribution function as the solution of the Boltzmann equation can be obtained by transforming electron energy of a variable in the equation to the logarithm of electron energy. An electron attachment coefficient becomes large at the end of the first half cycle of the current through the laser gap. At the same time, the discharge instability of the excimer laser is generated. It is shown that the large change of the electron density owing to the attachment is possible to be one of the factors bringing the discharge instability. The electron-energy distribution function is largely varied with krypton and fluorine concentrations and affects strongly the attachment coefficient.

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