Variability in Scaled MOS Transistors: Present Status and Measures

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  • 増大する微細ＭＯＳトランジスタの特性ばらつき：現状と対策
  • ゾウダイスル ビサイ MOS トランジスタ ノ トクセイ バラツキ ゲンジョウ ト タイサク

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The present status of variability in characteristics of the state-of-the-art MOS transistors is presented. The statistics of threshold voltage of arrayed transistors show the normal distribution. Special emphasis is placed on the analysis of random threshold voltage fluctuations. A new method to compare the amount of random variations in different fabs and different technologies is proposed. Finally, the measures to the variability of scaled CMOS are discussed.

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