水晶双音叉振動子を用いた高精度圧力センサ

渡辺 潤, 櫻井 俊信, 齋藤 佳邦, 佐藤 健太

doi:10.1541/ieejeiss.131.1101

水晶双音叉振動子を用いた高精度圧力センサ

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渡辺潤

セイコーエプソン（株）センシングシステムBU
櫻井俊信

エプソントヨコム（株） SDグループ
齋藤佳邦

セイコーエプソン（株）センシングシステムBU
佐藤健太

エプソントヨコム（株） SDグループ

書誌事項

タイトル別名

High Accuracy Pressure Sensor Using Quartz Dual Tuning Fork Resonator
スイショウソウオンサシンドウシオモチイタコウセイドアツリョクセンサ

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説明

We have developed a quartz pressure sensor for measuring with high accuracy. This sensor uses a dual tuning fork resonator which has frequency change by stress. Frequency change for full scale (FS) is about 10% on the basis of unloaded frequency. This sensor is good repeatability and hysteresis characteristics which is 0.005% FS and 0.008% FS respectively. In addition, pressure transducer are all fabricated by quartz through the technology of photolithography. Indeed, microprocessor-based measuring system is available with high speed counter timer to measure transducer's frequency and to compensate transducer's temperature characteristics and linearity.