An Inchworm-type Multi-DOF Stage
-
- Torii Akihiro
- Faculty of Engineering, Aichi Institute of Technology
-
- Yamada Tomohiro
- Faculty of Engineering, Aichi Institute of Technology
-
- Kamiya Ryosuke
- Faculty of Engineering, Aichi Institute of Technology
-
- Ueda Akiteru
- Faculty of Engineering, Aichi Institute of Technology
-
- Doki Kae
- Faculty of Engineering, Aichi Institute of Technology
Bibliographic Information
- Other Title
-
- インチワーム型多自由度ステージ
- インチワームガタ タジユウド ステージ
Search this article
Abstract
This paper describes an inchworm-type multi-degree-of-freedom stage, which consists of a platform, linear links and a base. The stage is based on a self-propelled Stewart-platform. We use six stacked-type piezoelectric actuators as the linear links. Six electromagnets are used in the stage. The electromagnets connect the linear links to the base and to the platform. This structure enables the Stewart-platfom to move on a surface by using the principle of an inchworm. The platform supported by the linear links is also operated by the principle of an inchworm, which enables the platform to rotate in the tilt directions. While the electromagnets fix the linear actuators on the base, the platform of the proposed stage realizes a precise multi-DOF motion. Design, principle, and control signals are described. The position and orientation of the moving platform is measured, and some experimental results indicate the feasibility of the proposed stage. The mechanism is effective for a precise positioning system which has a wide working area.
Journal
-
- IEEJ Transactions on Electronics, Information and Systems
-
IEEJ Transactions on Electronics, Information and Systems 133 (4), 849-855, 2013
The Institute of Electrical Engineers of Japan
- Tweet
Details 詳細情報について
-
- CRID
- 1390001204609535872
-
- NII Article ID
- 10031161284
-
- NII Book ID
- AN10065950
-
- ISSN
- 13488155
- 03854221
-
- NDL BIB ID
- 024642850
-
- Text Lang
- ja
-
- Data Source
-
- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
-
- Abstract License Flag
- Disallowed